Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

10.1088/0960-1317/22/5/055012

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Bibliographic Details
Main Authors: Lou, L., Zhang, S., Park, W.-T., Tsai, J.M., Kwong, D.-L., Lee, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/82845
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Institution: National University of Singapore
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Summary:10.1088/0960-1317/22/5/055012

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