Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

10.1088/0960-1317/22/5/055012

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Main Authors:	Lou, L., Zhang, S., Park, W.-T., Tsai, J.M., Kwong, D.-L., Lee, C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82845
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-828452023-10-30T07:58:23Z Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements Lou, L. Zhang, S. Park, W.-T. Tsai, J.M. Kwong, D.-L. Lee, C. ELECTRICAL & COMPUTER ENGINEERING 10.1088/0960-1317/22/5/055012 Journal of Micromechanics and Microengineering 22 5 - JMMIE 2014-10-07T04:34:11Z 2014-10-07T04:34:11Z 2012-05 Article Lou, L., Zhang, S., Park, W.-T., Tsai, J.M., Kwong, D.-L., Lee, C. (2012-05). Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements. Journal of Micromechanics and Microengineering 22 (5) : -. ScholarBank@NUS Repository. https://doi.org/10.1088/0960-1317/22/5/055012 09601317 http://scholarbank.nus.edu.sg/handle/10635/82845 000303197000012 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1088/0960-1317/22/5/055012
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lou, L. Zhang, S. Park, W.-T. Tsai, J.M. Kwong, D.-L. Lee, C.
format	Article
author	Lou, L. Zhang, S. Park, W.-T. Tsai, J.M. Kwong, D.-L. Lee, C.
spellingShingle	Lou, L. Zhang, S. Park, W.-T. Tsai, J.M. Kwong, D.-L. Lee, C. Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
author_sort	Lou, L.
title	Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
title_short	Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
title_full	Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
title_fullStr	Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
title_full_unstemmed	Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
title_sort	optimization of nems pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82845
_version_	1781784235439292416

Optimization of NEMS pressure sensors with a multilayered diaphragm using silicon nanowires as piezoresistive sensing elements

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