Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition

10.1016/j.tsf.2010.03.106

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Bibliographic Details
Main Authors:	Tian, F., Chor, E.F.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	AlGaN/GaN Hafnium oxide (HfO2) Heterostructure field effect transistors (HFETs) Pulsed laser deposition (PLD)
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/82902
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-829022023-10-29T22:25:16Z Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition Tian, F. Chor, E.F. ELECTRICAL & COMPUTER ENGINEERING AlGaN/GaN Hafnium oxide (HfO2) Heterostructure field effect transistors (HFETs) Pulsed laser deposition (PLD) 10.1016/j.tsf.2010.03.106 Thin Solid Films 518 24 SUPPL. e121-e124 THSFA 2014-10-07T04:34:50Z 2014-10-07T04:34:50Z 2010-10-01 Article Tian, F., Chor, E.F. (2010-10-01). Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition. Thin Solid Films 518 (24 SUPPL.) : e121-e124. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2010.03.106 00406090 http://scholarbank.nus.edu.sg/handle/10635/82902 000295942000032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	AlGaN/GaN Hafnium oxide (HfO2) Heterostructure field effect transistors (HFETs) Pulsed laser deposition (PLD)
spellingShingle	AlGaN/GaN Hafnium oxide (HfO2) Heterostructure field effect transistors (HFETs) Pulsed laser deposition (PLD) Tian, F. Chor, E.F. Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
description	10.1016/j.tsf.2010.03.106
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Tian, F. Chor, E.F.
format	Article
author	Tian, F. Chor, E.F.
author_sort	Tian, F.
title	Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
title_short	Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
title_full	Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
title_fullStr	Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
title_full_unstemmed	Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition
title_sort	physical and electrical characteristics of hafnium oxide films on algan/gan heterostructure grown by pulsed laser deposition
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/82902
_version_	1781784248590532608

Physical and electrical characteristics of hafnium oxide films on AlGaN/GaN heterostructure grown by pulsed laser deposition

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