Tensile-strained germanium CMOS integration on silicon

10.1109/LED.2007.909836

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Main Authors: Zang, H., Loh, W.Y., Ye, J.D., Lo, G.Q., Cho, B.J.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/83155
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-831552023-10-29T20:23:37Z Tensile-strained germanium CMOS integration on silicon Zang, H. Loh, W.Y. Ye, J.D. Lo, G.Q. Cho, B.J. ELECTRICAL & COMPUTER ENGINEERING CMOS CMOS integrated circuits Germanium (Ge) HfO2 High-κ MOSFET Tensile strength 10.1109/LED.2007.909836 IEEE Electron Device Letters 28 12 1117-1119 EDLED 2014-10-07T04:37:56Z 2014-10-07T04:37:56Z 2007-12 Article Zang, H., Loh, W.Y., Ye, J.D., Lo, G.Q., Cho, B.J. (2007-12). Tensile-strained germanium CMOS integration on silicon. IEEE Electron Device Letters 28 (12) : 1117-1119. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2007.909836 07413106 http://scholarbank.nus.edu.sg/handle/10635/83155 000251429800014 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic CMOS
CMOS integrated circuits
Germanium (Ge)
HfO2
High-κ
MOSFET
Tensile strength
spellingShingle CMOS
CMOS integrated circuits
Germanium (Ge)
HfO2
High-κ
MOSFET
Tensile strength
Zang, H.
Loh, W.Y.
Ye, J.D.
Lo, G.Q.
Cho, B.J.
Tensile-strained germanium CMOS integration on silicon
description 10.1109/LED.2007.909836
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zang, H.
Loh, W.Y.
Ye, J.D.
Lo, G.Q.
Cho, B.J.
format Article
author Zang, H.
Loh, W.Y.
Ye, J.D.
Lo, G.Q.
Cho, B.J.
author_sort Zang, H.
title Tensile-strained germanium CMOS integration on silicon
title_short Tensile-strained germanium CMOS integration on silicon
title_full Tensile-strained germanium CMOS integration on silicon
title_fullStr Tensile-strained germanium CMOS integration on silicon
title_full_unstemmed Tensile-strained germanium CMOS integration on silicon
title_sort tensile-strained germanium cmos integration on silicon
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83155
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