Thermal stability of (HfO2)x(Al2O 3)1-x on Si

10.1063/1.1519733

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Main Authors: Yu, H.Y., Wu, N., Li, M.F., Zhu, C., Cho, B.J., Kwong, D.-L., Tung, C.H., Pan, J.S., Chai, J.W., Wang, W.D., Chi, D.Z., Ang, C.H., Zheng, J.Z., Ramanathan, S.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83192
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-831922023-10-25T22:57:31Z Thermal stability of (HfO2)x(Al2O 3)1-x on Si Yu, H.Y. Wu, N. Li, M.F. Zhu, C. Cho, B.J. Kwong, D.-L. Tung, C.H. Pan, J.S. Chai, J.W. Wang, W.D. Chi, D.Z. Ang, C.H. Zheng, J.Z. Ramanathan, S. ELECTRICAL & COMPUTER ENGINEERING 10.1063/1.1519733 Applied Physics Letters 81 19 3618-3620 APPLA 2014-10-07T04:38:22Z 2014-10-07T04:38:22Z 2002-11-04 Article Yu, H.Y., Wu, N., Li, M.F., Zhu, C., Cho, B.J., Kwong, D.-L., Tung, C.H., Pan, J.S., Chai, J.W., Wang, W.D., Chi, D.Z., Ang, C.H., Zheng, J.Z., Ramanathan, S. (2002-11-04). Thermal stability of (HfO2)x(Al2O 3)1-x on Si. Applied Physics Letters 81 (19) : 3618-3620. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1519733 00036951 http://scholarbank.nus.edu.sg/handle/10635/83192 000178935200034 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.1519733
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yu, H.Y.
Wu, N.
Li, M.F.
Zhu, C.
Cho, B.J.
Kwong, D.-L.
Tung, C.H.
Pan, J.S.
Chai, J.W.
Wang, W.D.
Chi, D.Z.
Ang, C.H.
Zheng, J.Z.
Ramanathan, S.
format Article
author Yu, H.Y.
Wu, N.
Li, M.F.
Zhu, C.
Cho, B.J.
Kwong, D.-L.
Tung, C.H.
Pan, J.S.
Chai, J.W.
Wang, W.D.
Chi, D.Z.
Ang, C.H.
Zheng, J.Z.
Ramanathan, S.
spellingShingle Yu, H.Y.
Wu, N.
Li, M.F.
Zhu, C.
Cho, B.J.
Kwong, D.-L.
Tung, C.H.
Pan, J.S.
Chai, J.W.
Wang, W.D.
Chi, D.Z.
Ang, C.H.
Zheng, J.Z.
Ramanathan, S.
Thermal stability of (HfO2)x(Al2O 3)1-x on Si
author_sort Yu, H.Y.
title Thermal stability of (HfO2)x(Al2O 3)1-x on Si
title_short Thermal stability of (HfO2)x(Al2O 3)1-x on Si
title_full Thermal stability of (HfO2)x(Al2O 3)1-x on Si
title_fullStr Thermal stability of (HfO2)x(Al2O 3)1-x on Si
title_full_unstemmed Thermal stability of (HfO2)x(Al2O 3)1-x on Si
title_sort thermal stability of (hfo2)x(al2o 3)1-x on si
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83192
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