Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices

10.1109/LED.2004.841861

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Main Authors: Yu, D.S., Chin, A., Liao, C.C., Lee, C.F., Cheng, C.F., Li, M.F., Yoo, W.J., McAlister, S.P.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Article
Published: 2014
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Online Access:http://scholarbank.nus.edu.sg/handle/10635/83205
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-832052023-10-30T07:11:59Z Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices Yu, D.S. Chin, A. Liao, C.C. Lee, C.F. Cheng, C.F. Li, M.F. Yoo, W.J. McAlister, S.P. ELECTRICAL & COMPUTER ENGINEERING Ge-on-insulator (GOI) LaA1O3 Metal-gate MOSFET Three-dimensional (3-D) 10.1109/LED.2004.841861 IEEE Electron Device Letters 26 2 118-120 EDLED 2014-10-07T04:38:31Z 2014-10-07T04:38:31Z 2005-02 Article Yu, D.S., Chin, A., Liao, C.C., Lee, C.F., Cheng, C.F., Li, M.F., Yoo, W.J., McAlister, S.P. (2005-02). Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices. IEEE Electron Device Letters 26 (2) : 118-120. ScholarBank@NUS Repository. https://doi.org/10.1109/LED.2004.841861 07413106 http://scholarbank.nus.edu.sg/handle/10635/83205 000226479100023 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic Ge-on-insulator (GOI)
LaA1O3
Metal-gate
MOSFET
Three-dimensional (3-D)
spellingShingle Ge-on-insulator (GOI)
LaA1O3
Metal-gate
MOSFET
Three-dimensional (3-D)
Yu, D.S.
Chin, A.
Liao, C.C.
Lee, C.F.
Cheng, C.F.
Li, M.F.
Yoo, W.J.
McAlister, S.P.
Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
description 10.1109/LED.2004.841861
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Yu, D.S.
Chin, A.
Liao, C.C.
Lee, C.F.
Cheng, C.F.
Li, M.F.
Yoo, W.J.
McAlister, S.P.
format Article
author Yu, D.S.
Chin, A.
Liao, C.C.
Lee, C.F.
Cheng, C.F.
Li, M.F.
Yoo, W.J.
McAlister, S.P.
author_sort Yu, D.S.
title Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
title_short Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
title_full Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
title_fullStr Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
title_full_unstemmed Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
title_sort three-dimensional metal gate-high-κ-goi cmosfets on 1-poly-6-metal 0.18-μm si devices
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83205
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