Three-dimensional metal gate-high-Κ-GOI CMOSFETs on 1-poly-6-metal 0.18-μm Si devices
10.1109/LED.2004.841861
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Main Authors: | Yu, D.S., Chin, A., Liao, C.C., Lee, C.F., Cheng, C.F., Li, M.F., Yoo, W.J., McAlister, S.P. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83205 |
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Institution: | National University of Singapore |
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