Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity

10.1109/TED.2008.2011572

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Bibliographic Details
Main Authors:	Lim, A.E.-J., Kwong, D.-L., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Article
Published:	2014
Subjects:	Aluminum (Al) Interface dipole Metal gate Terbium (Tb) Work function engineering
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83277
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-832772024-11-08T16:45:10Z Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity Lim, A.E.-J. Kwong, D.-L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING Aluminum (Al) Interface dipole Metal gate Terbium (Tb) Work function engineering 10.1109/TED.2008.2011572 IEEE Transactions on Electron Devices 56 3 466-473 IETDA 2014-10-07T04:39:24Z 2014-10-07T04:39:24Z 2009 Article Lim, A.E.-J., Kwong, D.-L., Yeo, Y.-C. (2009). Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity. IEEE Transactions on Electron Devices 56 (3) : 466-473. ScholarBank@NUS Repository. https://doi.org/10.1109/TED.2008.2011572 00189383 http://scholarbank.nus.edu.sg/handle/10635/83277 000264019300014 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Aluminum (Al) Interface dipole Metal gate Terbium (Tb) Work function engineering
spellingShingle	Aluminum (Al) Interface dipole Metal gate Terbium (Tb) Work function engineering Lim, A.E.-J. Kwong, D.-L. Yeo, Y.-C. Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
description	10.1109/TED.2008.2011572
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Lim, A.E.-J. Kwong, D.-L. Yeo, Y.-C.
format	Article
author	Lim, A.E.-J. Kwong, D.-L. Yeo, Y.-C.
author_sort	Lim, A.E.-J.
title	Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
title_short	Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
title_full	Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
title_fullStr	Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
title_full_unstemmed	Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
title_sort	work function engineering within a single metal gate stack: manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83277
_version_	1821186506466787328

Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity

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