Work function engineering within a single metal gate stack: Manipulating terbium- and aluminum-induced interface dipoles of opposing polarity
10.1109/TED.2008.2011572
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Main Authors: | Lim, A.E.-J., Kwong, D.-L., Yeo, Y.-C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Article |
Published: |
2014
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Subjects: | |
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83277 |
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Institution: | National University of Singapore |
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