3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS

Technical Digest - International Electron Devices Meeting, IEDM

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Main Authors:	Yu, D.S., Chin, A., Laio, C.C., Lee, C.F., Cheng, C.F., Chen, W.J., Zhu, C., Li, M.-F., Yoo, W.J., McAlister, S.P., Kwong, D.L.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83297
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83297
record_format	dspace
spelling	sg-nus-scholar.10635-832972015-02-02T06:15:18Z 3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS Yu, D.S. Chin, A. Laio, C.C. Lee, C.F. Cheng, C.F. Chen, W.J. Zhu, C. Li, M.-F. Yoo, W.J. McAlister, S.P. Kwong, D.L. ELECTRICAL & COMPUTER ENGINEERING Technical Digest - International Electron Devices Meeting, IEDM 181-184 TDIMD 2014-10-07T04:39:40Z 2014-10-07T04:39:40Z 2004 Conference Paper Yu, D.S.,Chin, A.,Laio, C.C.,Lee, C.F.,Cheng, C.F.,Chen, W.J.,Zhu, C.,Li, M.-F.,Yoo, W.J.,McAlister, S.P.,Kwong, D.L. (2004). 3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS. Technical Digest - International Electron Devices Meeting, IEDM : 181-184. ScholarBank@NUS Repository. 01631918 http://scholarbank.nus.edu.sg/handle/10635/83297 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Technical Digest - International Electron Devices Meeting, IEDM
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Yu, D.S. Chin, A. Laio, C.C. Lee, C.F. Cheng, C.F. Chen, W.J. Zhu, C. Li, M.-F. Yoo, W.J. McAlister, S.P. Kwong, D.L.
format	Conference or Workshop Item
author	Yu, D.S. Chin, A. Laio, C.C. Lee, C.F. Cheng, C.F. Chen, W.J. Zhu, C. Li, M.-F. Yoo, W.J. McAlister, S.P. Kwong, D.L.
spellingShingle	Yu, D.S. Chin, A. Laio, C.C. Lee, C.F. Cheng, C.F. Chen, W.J. Zhu, C. Li, M.-F. Yoo, W.J. McAlister, S.P. Kwong, D.L. 3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS
author_sort	Yu, D.S.
title	3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS
title_short	3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS
title_full	3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS
title_fullStr	3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS
title_full_unstemmed	3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS
title_sort	3d goi cmosfets with novel iro 2(hf) dual gates and high-κ dielectric on 1p6m-0.18μm-cmos
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83297
_version_	1681089409852637184

3D GOI CMOSFETs with novel IrO 2(Hf) dual gates and high-κ dielectric on 1P6M-0.18μm-CMOS

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