Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers

10.1109/ESSDERC.2007.4430916

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Main Authors: Lim, A.E.-J., Lee, R.T.P., Wang, X.P., Hwang, W.S., Tung, C.-H., Lai, D.M.Y., Samudra, G., Kwong, D.-L., Yeo, Y.-C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83508
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-835082023-10-29T21:03:33Z Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers Lim, A.E.-J. Lee, R.T.P. Wang, X.P. Hwang, W.S. Tung, C.-H. Lai, D.M.Y. Samudra, G. Kwong, D.-L. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/ESSDERC.2007.4430916 ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference 210-213 2014-10-07T04:42:01Z 2014-10-07T04:42:01Z 2008 Conference Paper Lim, A.E.-J., Lee, R.T.P., Wang, X.P., Hwang, W.S., Tung, C.-H., Lai, D.M.Y., Samudra, G., Kwong, D.-L., Yeo, Y.-C. (2008). Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers. ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference : 210-213. ScholarBank@NUS Repository. https://doi.org/10.1109/ESSDERC.2007.4430916 1424411238 http://scholarbank.nus.edu.sg/handle/10635/83508 000252831900044 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1109/ESSDERC.2007.4430916
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Lim, A.E.-J.
Lee, R.T.P.
Wang, X.P.
Hwang, W.S.
Tung, C.-H.
Lai, D.M.Y.
Samudra, G.
Kwong, D.-L.
Yeo, Y.-C.
format Conference or Workshop Item
author Lim, A.E.-J.
Lee, R.T.P.
Wang, X.P.
Hwang, W.S.
Tung, C.-H.
Lai, D.M.Y.
Samudra, G.
Kwong, D.-L.
Yeo, Y.-C.
spellingShingle Lim, A.E.-J.
Lee, R.T.P.
Wang, X.P.
Hwang, W.S.
Tung, C.-H.
Lai, D.M.Y.
Samudra, G.
Kwong, D.-L.
Yeo, Y.-C.
Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
author_sort Lim, A.E.-J.
title Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
title_short Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
title_full Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
title_fullStr Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
title_full_unstemmed Band edge NMOS work function for nickel fully-silicided (FUSI) gate obtained by the insertion of novel Y-, Tb-, and Yb-based interlayers
title_sort band edge nmos work function for nickel fully-silicided (fusi) gate obtained by the insertion of novel y-, tb-, and yb-based interlayers
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83508
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