CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack

10.1109/IEDM.2009.5424284

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Bibliographic Details
Main Authors:	Peng, J.W., Singh, N., Lo, G.Q., Kwong, D.L., Lee, S.J.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/83550
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-83550
record_format	dspace
spelling	sg-nus-scholar.10635-835502024-11-10T21:13:06Z CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack Peng, J.W. Singh, N. Lo, G.Q. Kwong, D.L. Lee, S.J. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IEDM.2009.5424284 Technical Digest - International Electron Devices Meeting, IEDM 38.2.1-38.2.4 TDIMD 2014-10-07T04:42:28Z 2014-10-07T04:42:28Z 2009 Conference Paper Peng, J.W.,Singh, N.,Lo, G.Q.,Kwong, D.L.,Lee, S.J. (2009). CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack. Technical Digest - International Electron Devices Meeting, IEDM : 38.2.1-38.2.4. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IEDM.2009.5424284" target="_blank">https://doi.org/10.1109/IEDM.2009.5424284</a> 9781424456406 01631918 http://scholarbank.nus.edu.sg/handle/10635/83550 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/IEDM.2009.5424284
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Peng, J.W. Singh, N. Lo, G.Q. Kwong, D.L. Lee, S.J.
format	Conference or Workshop Item
author	Peng, J.W. Singh, N. Lo, G.Q. Kwong, D.L. Lee, S.J.
spellingShingle	Peng, J.W. Singh, N. Lo, G.Q. Kwong, D.L. Lee, S.J. CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
author_sort	Peng, J.W.
title	CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
title_short	CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
title_full	CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
title_fullStr	CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
title_full_unstemmed	CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack
title_sort	cmos compatible ge/si core/shell nanowire gate-all-around pmosfet integrated with hfo2/tan gate stack
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/83550
_version_	1821188809887318016

CMOS compatible Ge/Si core/shell nanowire gate-all-around pMOSFET integrated with HfO2/TaN gate stack

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