High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization

High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization

10.1109/IEDM.2008.4796703

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Main Authors: Xie, R., Phung, T.H., He, W., Sun, Z., Yu, M., Cheng, Z., Zhu, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83781
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-837812015-02-25T16:34:27Z High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization Xie, R. Phung, T.H. He, W. Sun, Z. Yu, M. Cheng, Z. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/IEDM.2008.4796703 Technical Digest - International Electron Devices Meeting, IEDM - TDIMD 2014-10-07T04:45:06Z 2014-10-07T04:45:06Z 2008 Conference Paper Xie, R.,Phung, T.H.,He, W.,Sun, Z.,Yu, M.,Cheng, Z.,Zhu, C. (2008). High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization. Technical Digest - International Electron Devices Meeting, IEDM : -. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IEDM.2008.4796703" target="_blank">https://doi.org/10.1109/IEDM.2008.4796703</a> 9781424423781 01631918 http://scholarbank.nus.edu.sg/handle/10635/83781 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/IEDM.2008.4796703
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Xie, R.
Phung, T.H.
He, W.
Sun, Z.
Yu, M.
Cheng, Z.
Zhu, C.
format Conference or Workshop Item
author Xie, R.
Phung, T.H.
He, W.
Sun, Z.
Yu, M.
Cheng, Z.
Zhu, C.
spellingShingle Xie, R.
Phung, T.H.
He, W.
Sun, Z.
Yu, M.
Cheng, Z.
Zhu, C.
High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
author_sort Xie, R.
title High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
title_short High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
title_full High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
title_fullStr High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
title_full_unstemmed High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
title_sort high mobility high-k/ge pmosfets with 1 nm eot-new concept on interface engineering and interface characterization
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83781
_version_ 1681089499081211904

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