High mobility high-k/Ge pMOSFETs with 1 nm EOT-new concept on interface engineering and interface characterization
10.1109/IEDM.2008.4796703
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Main Authors: | Xie, R., Phung, T.H., He, W., Sun, Z., Yu, M., Cheng, Z., Zhu, C. |
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Other Authors: | ELECTRICAL & COMPUTER ENGINEERING |
Format: | Conference or Workshop Item |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/83781 |
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Institution: | National University of Singapore |
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