High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications

High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications

Technical Digest - International Electron Devices Meeting

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Main Authors: Hu, H., Ding, S.-J., Lim, H.F., Zhu, C., Li, M.F., Kim, S.J., Yu, X.F., Chen, J.H., Yong, Y.F., Cho, B.J., Chan, D.S.H., Rustagi, S.C., Yu, M.B., Tung, C.H., Du, A., My, D., Foo, P.D., Chin, A., Kwong, D.-L.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83782
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-837822015-01-08T02:42:44Z High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications Hu, H. Ding, S.-J. Lim, H.F. Zhu, C. Li, M.F. Kim, S.J. Yu, X.F. Chen, J.H. Yong, Y.F. Cho, B.J. Chan, D.S.H. Rustagi, S.C. Yu, M.B. Tung, C.H. Du, A. My, D. Foo, P.D. Chin, A. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Technical Digest - International Electron Devices Meeting 379-382 TDIMD 2014-10-07T04:45:07Z 2014-10-07T04:45:07Z 2003 Conference Paper Hu, H.,Ding, S.-J.,Lim, H.F.,Zhu, C.,Li, M.F.,Kim, S.J.,Yu, X.F.,Chen, J.H.,Yong, Y.F.,Cho, B.J.,Chan, D.S.H.,Rustagi, S.C.,Yu, M.B.,Tung, C.H.,Du, A.,My, D.,Foo, P.D.,Chin, A.,Kwong, D.-L. (2003). High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications. Technical Digest - International Electron Devices Meeting : 379-382. ScholarBank@NUS Repository. 01631918 http://scholarbank.nus.edu.sg/handle/10635/83782 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description Technical Digest - International Electron Devices Meeting
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Hu, H.
Ding, S.-J.
Lim, H.F.
Zhu, C.
Li, M.F.
Kim, S.J.
Yu, X.F.
Chen, J.H.
Yong, Y.F.
Cho, B.J.
Chan, D.S.H.
Rustagi, S.C.
Yu, M.B.
Tung, C.H.
Du, A.
My, D.
Foo, P.D.
Chin, A.
Kwong, D.-L.
format Conference or Workshop Item
author Hu, H.
Ding, S.-J.
Lim, H.F.
Zhu, C.
Li, M.F.
Kim, S.J.
Yu, X.F.
Chen, J.H.
Yong, Y.F.
Cho, B.J.
Chan, D.S.H.
Rustagi, S.C.
Yu, M.B.
Tung, C.H.
Du, A.
My, D.
Foo, P.D.
Chin, A.
Kwong, D.-L.
spellingShingle Hu, H.
Ding, S.-J.
Lim, H.F.
Zhu, C.
Li, M.F.
Kim, S.J.
Yu, X.F.
Chen, J.H.
Yong, Y.F.
Cho, B.J.
Chan, D.S.H.
Rustagi, S.C.
Yu, M.B.
Tung, C.H.
Du, A.
My, D.
Foo, P.D.
Chin, A.
Kwong, D.-L.
High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications
author_sort Hu, H.
title High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications
title_short High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications
title_full High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications
title_fullStr High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications
title_full_unstemmed High Performance ALD HfO 2-Al 2O 3 Laminate MIM Capacitors for RF and Mixed Signal IC Applications
title_sort high performance ald hfo 2-al 2o 3 laminate mim capacitors for rf and mixed signal ic applications
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83782
_version_ 1681089499258421248

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