High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process

High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process

10.1109/ICSICT.2006.306122

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Bibliographic Details
Main Authors: Zhang, Q.C., Huang, J.D., Wu, N., Chen, G.X., Hong, M.H., Bera, L.K., Zhu, C.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83784
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-837842015-01-07T12:30:34Z High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process Zhang, Q.C. Huang, J.D. Wu, N. Chen, G.X. Hong, M.H. Bera, L.K. Zhu, C. ELECTRICAL & COMPUTER ENGINEERING NUS NANOSCIENCE & NANOTECH INITIATIVE 10.1109/ICSICT.2006.306122 ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings 146-148 2014-10-07T04:45:09Z 2014-10-07T04:45:09Z 2007 Conference Paper Zhang, Q.C.,Huang, J.D.,Wu, N.,Chen, G.X.,Hong, M.H.,Bera, L.K.,Zhu, C. (2007). High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process. ICSICT-2006: 2006 8th International Conference on Solid-State and Integrated Circuit Technology, Proceedings : 146-148. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/ICSICT.2006.306122" target="_blank">https://doi.org/10.1109/ICSICT.2006.306122</a> 1424401615 http://scholarbank.nus.edu.sg/handle/10635/83784 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
description 10.1109/ICSICT.2006.306122
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zhang, Q.C.
Huang, J.D.
Wu, N.
Chen, G.X.
Hong, M.H.
Bera, L.K.
Zhu, C.
format Conference or Workshop Item
author Zhang, Q.C.
Huang, J.D.
Wu, N.
Chen, G.X.
Hong, M.H.
Bera, L.K.
Zhu, C.
spellingShingle Zhang, Q.C.
Huang, J.D.
Wu, N.
Chen, G.X.
Hong, M.H.
Bera, L.K.
Zhu, C.
High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process
author_sort Zhang, Q.C.
title High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process
title_short High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process
title_full High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process
title_fullStr High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process
title_full_unstemmed High performance high-k/metal gate germanium MOSFETs with shallow junction fabricated by laser thermal process
title_sort high performance high-k/metal gate germanium mosfets with shallow junction fabricated by laser thermal process
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83784
_version_ 1681089499627520000

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