In-situ measurement & control of photoresist development in microlithography

In-situ measurement & control of photoresist development in microlithography

10.1109/IMTC.2004.1351183

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Bibliographic Details
Main Authors: Kiew, C.M., Tay, A., Ho, W.K., Lim, K.W., Zhou, Y.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Microlithography
Photoresist development
Semiconductor manufacturing
Temperature control
Online Access:http://scholarbank.nus.edu.sg/handle/10635/83845
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-838452015-01-07T03:41:36Z In-situ measurement & control of photoresist development in microlithography Kiew, C.M. Tay, A. Ho, W.K. Lim, K.W. Zhou, Y. ELECTRICAL & COMPUTER ENGINEERING Microlithography Photoresist development Semiconductor manufacturing Temperature control 10.1109/IMTC.2004.1351183 Conference Record - IEEE Instrumentation and Measurement Technology Conference 2 803-808 CRIIE 2014-10-07T04:45:51Z 2014-10-07T04:45:51Z 2005 Conference Paper Kiew, C.M.,Tay, A.,Ho, W.K.,Lim, K.W.,Zhou, Y. (2005). In-situ measurement & control of photoresist development in microlithography. Conference Record - IEEE Instrumentation and Measurement Technology Conference 2 : 803-808. ScholarBank@NUS Repository. <a href="https://doi.org/10.1109/IMTC.2004.1351183" target="_blank">https://doi.org/10.1109/IMTC.2004.1351183</a> 078038248X 10915281 http://scholarbank.nus.edu.sg/handle/10635/83845 NOT_IN_WOS Scopus
institution National University of Singapore
building NUS Library
country Singapore
collection ScholarBank@NUS
topic Microlithography
Photoresist development
Semiconductor manufacturing
Temperature control
spellingShingle Microlithography
Photoresist development
Semiconductor manufacturing
Temperature control
Kiew, C.M.
Tay, A.
Ho, W.K.
Lim, K.W.
Zhou, Y.
In-situ measurement & control of photoresist development in microlithography
description 10.1109/IMTC.2004.1351183
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Kiew, C.M.
Tay, A.
Ho, W.K.
Lim, K.W.
Zhou, Y.
format Conference or Workshop Item
author Kiew, C.M.
Tay, A.
Ho, W.K.
Lim, K.W.
Zhou, Y.
author_sort Kiew, C.M.
title In-situ measurement & control of photoresist development in microlithography
title_short In-situ measurement & control of photoresist development in microlithography
title_full In-situ measurement & control of photoresist development in microlithography
title_fullStr In-situ measurement & control of photoresist development in microlithography
title_full_unstemmed In-situ measurement & control of photoresist development in microlithography
title_sort in-situ measurement & control of photoresist development in microlithography
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/83845
_version_ 1681089510740328448

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