P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction

10.1109/VTSA.2009.5159297

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Bibliographic Details
Main Authors:	Sinha, M., Lee, R.T.P., Devi, S.N., Lo, G.-Q., Chor, E.F., Yeo, Y.-C.
Other Authors:	ELECTRICAL & COMPUTER ENGINEERING
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/84082
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-84082
record_format	dspace
spelling	sg-nus-scholar.10635-840822023-10-29T23:31:21Z P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction Sinha, M. Lee, R.T.P. Devi, S.N. Lo, G.-Q. Chor, E.F. Yeo, Y.-C. ELECTRICAL & COMPUTER ENGINEERING 10.1109/VTSA.2009.5159297 International Symposium on VLSI Technology, Systems, and Applications, Proceedings 74-75 2014-10-07T04:48:35Z 2014-10-07T04:48:35Z 2009 Conference Paper Sinha, M., Lee, R.T.P., Devi, S.N., Lo, G.-Q., Chor, E.F., Yeo, Y.-C. (2009). P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction. International Symposium on VLSI Technology, Systems, and Applications, Proceedings : 74-75. ScholarBank@NUS Repository. https://doi.org/10.1109/VTSA.2009.5159297 9781424427857 http://scholarbank.nus.edu.sg/handle/10635/84082 000272451000032 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1109/VTSA.2009.5159297
author2	ELECTRICAL & COMPUTER ENGINEERING
author_facet	ELECTRICAL & COMPUTER ENGINEERING Sinha, M. Lee, R.T.P. Devi, S.N. Lo, G.-Q. Chor, E.F. Yeo, Y.-C.
format	Conference or Workshop Item
author	Sinha, M. Lee, R.T.P. Devi, S.N. Lo, G.-Q. Chor, E.F. Yeo, Y.-C.
spellingShingle	Sinha, M. Lee, R.T.P. Devi, S.N. Lo, G.-Q. Chor, E.F. Yeo, Y.-C. P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction
author_sort	Sinha, M.
title	P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction
title_short	P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction
title_full	P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction
title_fullStr	P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction
title_full_unstemmed	P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction
title_sort	p-finfets with al segregated nisi/p+-si source/drain contact junction for series resistance reduction
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/84082
_version_	1781784419803070464

P-FinFETs with Al segregated NiSi/p+-Si source/drain contact junction for series resistance reduction

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