Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)

Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)

10.1016/j.jcrysgro.2004.04.083

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Bibliographic Details
Main Authors: Zang, K.Y., Wang, L.S., Chua, S.J., Thompson, C.V.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
A1. Atomic force microscopy
A1. Transmission electron microscopy
B1. AlN
B1. GaN
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84238
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Institution: National University of Singapore
Description
Summary:10.1016/j.jcrysgro.2004.04.083

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