Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)

• Main Authors: Zang, K.Y., Wang, L.S., Chua, S.J., Thompson, C.V.
• Other Authors: ELECTRICAL & COMPUTER ENGINEERING
• Format: Conference or Workshop Item
• Published: 2014
• Subjects: A1. Atomic force microscopy; A1. Transmission electron microscopy; B1. AlN; B1. GaN
• Online Access: http://scholarbank.nus.edu.sg/handle/10635/84238
• Institution: National University of Singapore

10.1016/j.jcrysgro.2004.04.083