Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)

10.1016/j.jcrysgro.2004.04.083

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Main Authors: Zang, K.Y., Wang, L.S., Chua, S.J., Thompson, C.V.
Other Authors: ELECTRICAL & COMPUTER ENGINEERING
Format: Conference or Workshop Item
Published: 2014
Subjects:
Online Access:http://scholarbank.nus.edu.sg/handle/10635/84238
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-842382023-10-30T22:53:38Z Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1) Zang, K.Y. Wang, L.S. Chua, S.J. Thompson, C.V. ELECTRICAL & COMPUTER ENGINEERING A1. Atomic force microscopy A1. Transmission electron microscopy B1. AlN B1. GaN 10.1016/j.jcrysgro.2004.04.083 Journal of Crystal Growth 268 3-4 SPEC. ISS. 515-520 JCRGA 2014-10-07T04:50:23Z 2014-10-07T04:50:23Z 2004-08-01 Conference Paper Zang, K.Y., Wang, L.S., Chua, S.J., Thompson, C.V. (2004-08-01). Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1). Journal of Crystal Growth 268 (3-4 SPEC. ISS.) : 515-520. ScholarBank@NUS Repository. https://doi.org/10.1016/j.jcrysgro.2004.04.083 00220248 http://scholarbank.nus.edu.sg/handle/10635/84238 000223087000034 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic A1. Atomic force microscopy
A1. Transmission electron microscopy
B1. AlN
B1. GaN
spellingShingle A1. Atomic force microscopy
A1. Transmission electron microscopy
B1. AlN
B1. GaN
Zang, K.Y.
Wang, L.S.
Chua, S.J.
Thompson, C.V.
Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)
description 10.1016/j.jcrysgro.2004.04.083
author2 ELECTRICAL & COMPUTER ENGINEERING
author_facet ELECTRICAL & COMPUTER ENGINEERING
Zang, K.Y.
Wang, L.S.
Chua, S.J.
Thompson, C.V.
format Conference or Workshop Item
author Zang, K.Y.
Wang, L.S.
Chua, S.J.
Thompson, C.V.
author_sort Zang, K.Y.
title Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)
title_short Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)
title_full Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)
title_fullStr Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)
title_full_unstemmed Structural analysis of metalorganic chemical vapor deposited AIN nucleation layers on Si (1 1 1)
title_sort structural analysis of metalorganic chemical vapor deposited ain nucleation layers on si (1 1 1)
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/84238
_version_ 1781784434803998720