Work function tuning of metal nitride electrodes for advanced CMOS devices
10.1016/j.tsf.2005.09.081
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2014
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sg-nus-scholar.10635-843672023-10-29T23:08:08Z Work function tuning of metal nitride electrodes for advanced CMOS devices Ren, C. Faizhal, B.B. Chan, D.S.H. Li, M.-F. Yeo, Y.-C. Trigg, A.D. Balasubramanian, N. Kwong, D.-L. ELECTRICAL & COMPUTER ENGINEERING Lanthanide Metal gate electrode Metal nitride Work function tuning 10.1016/j.tsf.2005.09.081 Thin Solid Films 504 1-2 174-177 THSFA 2014-10-07T04:51:52Z 2014-10-07T04:51:52Z 2006-05-10 Conference Paper Ren, C., Faizhal, B.B., Chan, D.S.H., Li, M.-F., Yeo, Y.-C., Trigg, A.D., Balasubramanian, N., Kwong, D.-L. (2006-05-10). Work function tuning of metal nitride electrodes for advanced CMOS devices. Thin Solid Films 504 (1-2) : 174-177. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2005.09.081 00406090 http://scholarbank.nus.edu.sg/handle/10635/84367 000236486200042 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
Lanthanide Metal gate electrode Metal nitride Work function tuning |
| spellingShingle |
Lanthanide Metal gate electrode Metal nitride Work function tuning Ren, C. Faizhal, B.B. Chan, D.S.H. Li, M.-F. Yeo, Y.-C. Trigg, A.D. Balasubramanian, N. Kwong, D.-L. Work function tuning of metal nitride electrodes for advanced CMOS devices |
| description |
10.1016/j.tsf.2005.09.081 |
| author2 |
ELECTRICAL & COMPUTER ENGINEERING |
| author_facet |
ELECTRICAL & COMPUTER ENGINEERING Ren, C. Faizhal, B.B. Chan, D.S.H. Li, M.-F. Yeo, Y.-C. Trigg, A.D. Balasubramanian, N. Kwong, D.-L. |
| format |
Conference or Workshop Item |
| author |
Ren, C. Faizhal, B.B. Chan, D.S.H. Li, M.-F. Yeo, Y.-C. Trigg, A.D. Balasubramanian, N. Kwong, D.-L. |
| author_sort |
Ren, C. |
| title |
Work function tuning of metal nitride electrodes for advanced CMOS devices |
| title_short |
Work function tuning of metal nitride electrodes for advanced CMOS devices |
| title_full |
Work function tuning of metal nitride electrodes for advanced CMOS devices |
| title_fullStr |
Work function tuning of metal nitride electrodes for advanced CMOS devices |
| title_full_unstemmed |
Work function tuning of metal nitride electrodes for advanced CMOS devices |
| title_sort |
work function tuning of metal nitride electrodes for advanced cmos devices |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84367 |
| _version_ |
1781784444002107392 |