Monitoring and control of photoresist properties and CD during photoresist processing
10.1117/12.846560
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2014
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sg-nus-scholar.10635-844852023-10-31T07:33:59Z Monitoring and control of photoresist properties and CD during photoresist processing Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P. DEAN'S OFFICE (ENGINEERING) ELECTRICAL & COMPUTER ENGINEERING Photoresist processing real-time control temperature control 10.1117/12.846560 Proceedings of SPIE - The International Society for Optical Engineering 7638 - PSISD 2014-10-07T05:24:53Z 2014-10-07T05:24:53Z 2010 Conference Paper Yang, G., Ngo, Y.-S., Putra, A.S., Ang, K.-T., Tay, A., Fang, Z.-P. (2010). Monitoring and control of photoresist properties and CD during photoresist processing. Proceedings of SPIE - The International Society for Optical Engineering 7638 : -. ScholarBank@NUS Repository. https://doi.org/10.1117/12.846560 9780819480521 0277786X http://scholarbank.nus.edu.sg/handle/10635/84485 000285046100072 Scopus |
| institution |
National University of Singapore |
| building |
NUS Library |
| continent |
Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
| collection |
ScholarBank@NUS |
| topic |
Photoresist processing real-time control temperature control |
| spellingShingle |
Photoresist processing real-time control temperature control Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P. Monitoring and control of photoresist properties and CD during photoresist processing |
| description |
10.1117/12.846560 |
| author2 |
DEAN'S OFFICE (ENGINEERING) |
| author_facet |
DEAN'S OFFICE (ENGINEERING) Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P. |
| format |
Conference or Workshop Item |
| author |
Yang, G. Ngo, Y.-S. Putra, A.S. Ang, K.-T. Tay, A. Fang, Z.-P. |
| author_sort |
Yang, G. |
| title |
Monitoring and control of photoresist properties and CD during photoresist processing |
| title_short |
Monitoring and control of photoresist properties and CD during photoresist processing |
| title_full |
Monitoring and control of photoresist properties and CD during photoresist processing |
| title_fullStr |
Monitoring and control of photoresist properties and CD during photoresist processing |
| title_full_unstemmed |
Monitoring and control of photoresist properties and CD during photoresist processing |
| title_sort |
monitoring and control of photoresist properties and cd during photoresist processing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/84485 |
| _version_ |
1781784459719213056 |