Study of titanium suicide formation using spike anneal for integrated chip manufacturing

Study of titanium suicide formation using spike anneal for integrated chip manufacturing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Bibliographic Details
Main Authors: Tan, C.C., Lu, L., Lai, C.W., See, A., Chan, L.H.
Other Authors: MECHANICAL ENGINEERING
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/85689
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Institution: National University of Singapore
Description
Summary:Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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