Study of titanium suicide formation using spike anneal for integrated chip manufacturing

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

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Main Authors:	Tan, C.C., Lu, L., Lai, C.W., See, A., Chan, L.H.
Other Authors:	MECHANICAL ENGINEERING
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/85689
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-856892015-04-07T07:49:11Z Study of titanium suicide formation using spike anneal for integrated chip manufacturing Tan, C.C. Lu, L. Lai, C.W. See, A. Chan, L.H. MECHANICAL ENGINEERING Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 2 767-774 JVTBD 2014-10-07T09:10:59Z 2014-10-07T09:10:59Z 2003-03 Article Tan, C.C.,Lu, L.,Lai, C.W.,See, A.,Chan, L.H. (2003-03). Study of titanium suicide formation using spike anneal for integrated chip manufacturing. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 21 (2) : 767-774. ScholarBank@NUS Repository. 10711023 http://scholarbank.nus.edu.sg/handle/10635/85689 NOT_IN_WOS Scopus
institution	National University of Singapore
building	NUS Library
country	Singapore
collection	ScholarBank@NUS
description	Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
author2	MECHANICAL ENGINEERING
author_facet	MECHANICAL ENGINEERING Tan, C.C. Lu, L. Lai, C.W. See, A. Chan, L.H.
format	Article
author	Tan, C.C. Lu, L. Lai, C.W. See, A. Chan, L.H.
spellingShingle	Tan, C.C. Lu, L. Lai, C.W. See, A. Chan, L.H. Study of titanium suicide formation using spike anneal for integrated chip manufacturing
author_sort	Tan, C.C.
title	Study of titanium suicide formation using spike anneal for integrated chip manufacturing
title_short	Study of titanium suicide formation using spike anneal for integrated chip manufacturing
title_full	Study of titanium suicide formation using spike anneal for integrated chip manufacturing
title_fullStr	Study of titanium suicide formation using spike anneal for integrated chip manufacturing
title_full_unstemmed	Study of titanium suicide formation using spike anneal for integrated chip manufacturing
title_sort	study of titanium suicide formation using spike anneal for integrated chip manufacturing
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/85689
_version_	1681089846585589760

Study of titanium suicide formation using spike anneal for integrated chip manufacturing

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