Study of titanium suicide formation using spike anneal for integrated chip manufacturing
Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
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Main Authors: | Tan, C.C., Lu, L., Lai, C.W., See, A., Chan, L.H. |
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Other Authors: | MECHANICAL ENGINEERING |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/85689 |
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Institution: | National University of Singapore |
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