Study of interactions between α-Ta films and SiO2 under rapid thermal annealing
10.1016/j.tsf.2004.05.056
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2014
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sg-nus-scholar.10635-902202023-10-27T08:42:12Z Study of interactions between α-Ta films and SiO2 under rapid thermal annealing Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. CHEMICAL & BIOMOLECULAR ENGINEERING α-Ta Cu metallization Diffusion barrier Rapid thermal annealing SiO2 10.1016/j.tsf.2004.05.056 Thin Solid Films 462-463 SPEC. ISS. 279-283 THSFA 2014-10-09T07:02:46Z 2014-10-09T07:02:46Z 2004-09 Article Yuan, Z.L., Zhang, D.H., Li, C.Y., Prasad, K., Tan, C.M. (2004-09). Study of interactions between α-Ta films and SiO2 under rapid thermal annealing. Thin Solid Films 462-463 (SPEC. ISS.) : 279-283. ScholarBank@NUS Repository. https://doi.org/10.1016/j.tsf.2004.05.056 00406090 http://scholarbank.nus.edu.sg/handle/10635/90220 000223812800057 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
| content_provider |
NUS Library |
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ScholarBank@NUS |
| topic |
α-Ta Cu metallization Diffusion barrier Rapid thermal annealing SiO2 |
| spellingShingle |
α-Ta Cu metallization Diffusion barrier Rapid thermal annealing SiO2 Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. Study of interactions between α-Ta films and SiO2 under rapid thermal annealing |
| description |
10.1016/j.tsf.2004.05.056 |
| author2 |
CHEMICAL & BIOMOLECULAR ENGINEERING |
| author_facet |
CHEMICAL & BIOMOLECULAR ENGINEERING Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. |
| format |
Article |
| author |
Yuan, Z.L. Zhang, D.H. Li, C.Y. Prasad, K. Tan, C.M. |
| author_sort |
Yuan, Z.L. |
| title |
Study of interactions between α-Ta films and SiO2 under rapid thermal annealing |
| title_short |
Study of interactions between α-Ta films and SiO2 under rapid thermal annealing |
| title_full |
Study of interactions between α-Ta films and SiO2 under rapid thermal annealing |
| title_fullStr |
Study of interactions between α-Ta films and SiO2 under rapid thermal annealing |
| title_full_unstemmed |
Study of interactions between α-Ta films and SiO2 under rapid thermal annealing |
| title_sort |
study of interactions between α-ta films and sio2 under rapid thermal annealing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/90220 |
| _version_ |
1781785486636875776 |