Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication
10.1116/1.1503791
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2014
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sg-nus-scholar.10635-923062023-10-30T21:50:32Z Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication Sin, C.-Y. Chen, B.-H. Loh, W.L. Yu, J. Yelehanka, P. See, A. Chan, L. CHEMICAL & ENVIRONMENTAL ENGINEERING 10.1116/1.1503791 Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 5 1974-1981 JVTBD 2014-10-09T10:00:05Z 2014-10-09T10:00:05Z 2002-09 Article Sin, C.-Y., Chen, B.-H., Loh, W.L., Yu, J., Yelehanka, P., See, A., Chan, L. (2002-09). Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication. Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures 20 (5) : 1974-1981. ScholarBank@NUS Repository. https://doi.org/10.1116/1.1503791 10711023 http://scholarbank.nus.edu.sg/handle/10635/92306 000178669200029 Scopus |
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Singapore Singapore |
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10.1116/1.1503791 |
| author2 |
CHEMICAL & ENVIRONMENTAL ENGINEERING |
| author_facet |
CHEMICAL & ENVIRONMENTAL ENGINEERING Sin, C.-Y. Chen, B.-H. Loh, W.L. Yu, J. Yelehanka, P. See, A. Chan, L. |
| format |
Article |
| author |
Sin, C.-Y. Chen, B.-H. Loh, W.L. Yu, J. Yelehanka, P. See, A. Chan, L. |
| spellingShingle |
Sin, C.-Y. Chen, B.-H. Loh, W.L. Yu, J. Yelehanka, P. See, A. Chan, L. Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication |
| author_sort |
Sin, C.-Y. |
| title |
Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication |
| title_short |
Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication |
| title_full |
Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication |
| title_fullStr |
Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication |
| title_full_unstemmed |
Resist trimming in high-density CF4/O2 plasmas for sub-0.1 μm device fabrication |
| title_sort |
resist trimming in high-density cf4/o2 plasmas for sub-0.1 μm device fabrication |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/92306 |
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1781785769274245120 |