A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results
10.1107/S0909049500018252
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2014
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sg-nus-scholar.10635-930172023-10-30T21:44:55Z A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results Hu, Y.F. Sham, T.K. Zou, Z. Xu, G.Q. Chan, L. Yates, B.W. Bancroft, G.M. CHEMISTRY Diffusion barrier Oxidation reaction Titanium nitride XANES 10.1107/S0909049500018252 Journal of Synchrotron Radiation 8 2 860-862 2014-10-16T08:19:26Z 2014-10-16T08:19:26Z 2001-03-01 Article Hu, Y.F., Sham, T.K., Zou, Z., Xu, G.Q., Chan, L., Yates, B.W., Bancroft, G.M. (2001-03-01). A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results. Journal of Synchrotron Radiation 8 (2) : 860-862. ScholarBank@NUS Repository. https://doi.org/10.1107/S0909049500018252 09090495 http://scholarbank.nus.edu.sg/handle/10635/93017 000167298100257 Scopus |
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NUS Library |
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Asia |
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Singapore Singapore |
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Diffusion barrier Oxidation reaction Titanium nitride XANES |
| spellingShingle |
Diffusion barrier Oxidation reaction Titanium nitride XANES Hu, Y.F. Sham, T.K. Zou, Z. Xu, G.Q. Chan, L. Yates, B.W. Bancroft, G.M. A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results |
| description |
10.1107/S0909049500018252 |
| author2 |
CHEMISTRY |
| author_facet |
CHEMISTRY Hu, Y.F. Sham, T.K. Zou, Z. Xu, G.Q. Chan, L. Yates, B.W. Bancroft, G.M. |
| format |
Article |
| author |
Hu, Y.F. Sham, T.K. Zou, Z. Xu, G.Q. Chan, L. Yates, B.W. Bancroft, G.M. |
| author_sort |
Hu, Y.F. |
| title |
A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results |
| title_short |
A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results |
| title_full |
A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results |
| title_fullStr |
A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results |
| title_full_unstemmed |
A study of titanium nitride diffusion barriers between aluminium and silicon by X-ray absorption spectroscopy: The Si, Ti and N results |
| title_sort |
study of titanium nitride diffusion barriers between aluminium and silicon by x-ray absorption spectroscopy: the si, ti and n results |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/93017 |
| _version_ |
1781785849214533632 |