AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation
10.1016/S0042-207X(96)00220-5
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sg-nus-scholar.10635-957382023-10-26T08:03:27Z AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. PHYSICS 10.1016/S0042-207X(96)00220-5 Vacuum 47 12 1495-1499 VACUA 2014-10-16T09:15:15Z 2014-10-16T09:15:15Z 1996-12 Article Pan, J.S., Wee, A.T.S., Huan, C.H.A., Tan, H.S., Tan, K.L. (1996-12). AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation. Vacuum 47 (12) : 1495-1499. ScholarBank@NUS Repository. https://doi.org/10.1016/S0042-207X(96)00220-5 0042207X http://scholarbank.nus.edu.sg/handle/10635/95738 A1996VY91600016 Scopus |
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National University of Singapore |
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Asia |
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Singapore Singapore |
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10.1016/S0042-207X(96)00220-5 |
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PHYSICS |
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PHYSICS Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. |
| format |
Article |
| author |
Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. |
| spellingShingle |
Pan, J.S. Wee, A.T.S. Huan, C.H.A. Tan, H.S. Tan, K.L. AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation |
| author_sort |
Pan, J.S. |
| title |
AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation |
| title_short |
AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation |
| title_full |
AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation |
| title_fullStr |
AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation |
| title_full_unstemmed |
AES analysis of silicon nitride formation by 10 keV N+ and N+ 2 ion implantation |
| title_sort |
aes analysis of silicon nitride formation by 10 kev n+ and n+ 2 ion implantation |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/95738 |
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1781786319924494336 |