Effects of surface alloying and orientation on work function of MoTa metal gate

Effects of surface alloying and orientation on work function of MoTa metal gate

10.1063/1.3204976

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Bibliographic Details
Main Authors: Xu, G., Wu, Q., Chen, Z., Huang, Z., Feng, Y.P.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96378
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Institution: National University of Singapore
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Summary:10.1063/1.3204976

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