Effects of surface alloying and orientation on work function of MoTa metal gate
10.1063/1.3204976
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Main Authors: | Xu, G., Wu, Q., Chen, Z., Huang, Z., Feng, Y.P. |
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Other Authors: | PHYSICS |
Format: | Article |
Published: |
2014
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Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96378 |
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Institution: | National University of Singapore |
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