Effects of surface alloying and orientation on work function of MoTa metal gate

10.1063/1.3204976

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Main Authors: Xu, G., Wu, Q., Chen, Z., Huang, Z., Feng, Y.P.
Other Authors: PHYSICS
Format: Article
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96378
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Institution: National University of Singapore
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spelling sg-nus-scholar.10635-963782023-10-25T22:57:43Z Effects of surface alloying and orientation on work function of MoTa metal gate Xu, G. Wu, Q. Chen, Z. Huang, Z. Feng, Y.P. PHYSICS 10.1063/1.3204976 Journal of Applied Physics 106 4 - JAPIA 2014-10-16T09:22:44Z 2014-10-16T09:22:44Z 2009 Article Xu, G., Wu, Q., Chen, Z., Huang, Z., Feng, Y.P. (2009). Effects of surface alloying and orientation on work function of MoTa metal gate. Journal of Applied Physics 106 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3204976 00218979 http://scholarbank.nus.edu.sg/handle/10635/96378 000270083800049 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
description 10.1063/1.3204976
author2 PHYSICS
author_facet PHYSICS
Xu, G.
Wu, Q.
Chen, Z.
Huang, Z.
Feng, Y.P.
format Article
author Xu, G.
Wu, Q.
Chen, Z.
Huang, Z.
Feng, Y.P.
spellingShingle Xu, G.
Wu, Q.
Chen, Z.
Huang, Z.
Feng, Y.P.
Effects of surface alloying and orientation on work function of MoTa metal gate
author_sort Xu, G.
title Effects of surface alloying and orientation on work function of MoTa metal gate
title_short Effects of surface alloying and orientation on work function of MoTa metal gate
title_full Effects of surface alloying and orientation on work function of MoTa metal gate
title_fullStr Effects of surface alloying and orientation on work function of MoTa metal gate
title_full_unstemmed Effects of surface alloying and orientation on work function of MoTa metal gate
title_sort effects of surface alloying and orientation on work function of mota metal gate
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/96378
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