Effects of surface alloying and orientation on work function of MoTa metal gate
10.1063/1.3204976
Saved in:
Main Authors: | , , , , |
---|---|
Other Authors: | |
Format: | Article |
Published: |
2014
|
Online Access: | http://scholarbank.nus.edu.sg/handle/10635/96378 |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Institution: | National University of Singapore |
id |
sg-nus-scholar.10635-96378 |
---|---|
record_format |
dspace |
spelling |
sg-nus-scholar.10635-963782023-10-25T22:57:43Z Effects of surface alloying and orientation on work function of MoTa metal gate Xu, G. Wu, Q. Chen, Z. Huang, Z. Feng, Y.P. PHYSICS 10.1063/1.3204976 Journal of Applied Physics 106 4 - JAPIA 2014-10-16T09:22:44Z 2014-10-16T09:22:44Z 2009 Article Xu, G., Wu, Q., Chen, Z., Huang, Z., Feng, Y.P. (2009). Effects of surface alloying and orientation on work function of MoTa metal gate. Journal of Applied Physics 106 (4) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.3204976 00218979 http://scholarbank.nus.edu.sg/handle/10635/96378 000270083800049 Scopus |
institution |
National University of Singapore |
building |
NUS Library |
continent |
Asia |
country |
Singapore Singapore |
content_provider |
NUS Library |
collection |
ScholarBank@NUS |
description |
10.1063/1.3204976 |
author2 |
PHYSICS |
author_facet |
PHYSICS Xu, G. Wu, Q. Chen, Z. Huang, Z. Feng, Y.P. |
format |
Article |
author |
Xu, G. Wu, Q. Chen, Z. Huang, Z. Feng, Y.P. |
spellingShingle |
Xu, G. Wu, Q. Chen, Z. Huang, Z. Feng, Y.P. Effects of surface alloying and orientation on work function of MoTa metal gate |
author_sort |
Xu, G. |
title |
Effects of surface alloying and orientation on work function of MoTa metal gate |
title_short |
Effects of surface alloying and orientation on work function of MoTa metal gate |
title_full |
Effects of surface alloying and orientation on work function of MoTa metal gate |
title_fullStr |
Effects of surface alloying and orientation on work function of MoTa metal gate |
title_full_unstemmed |
Effects of surface alloying and orientation on work function of MoTa metal gate |
title_sort |
effects of surface alloying and orientation on work function of mota metal gate |
publishDate |
2014 |
url |
http://scholarbank.nus.edu.sg/handle/10635/96378 |
_version_ |
1781786441247883264 |