Enhancement of proton beam writing in PMMA through optimization of the development procedure

Enhancement of proton beam writing in PMMA through optimization of the development procedure

10.1016/j.nimb.2009.03.045

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Bibliographic Details
Main Authors: Bolhuis, S., van Kan, J.A., Watt, F.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
Acoustic agitation
Development
Proton beam writing
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96475
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Institution: National University of Singapore
Description
Summary:10.1016/j.nimb.2009.03.045

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