Enhancement of proton beam writing in PMMA through optimization of the development procedure

10.1016/j.nimb.2009.03.045

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Bibliographic Details
Main Authors:	Bolhuis, S., van Kan, J.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Acoustic agitation Development Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96475
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-96475
record_format	dspace
spelling	sg-nus-scholar.10635-964752023-10-25T07:39:00Z Enhancement of proton beam writing in PMMA through optimization of the development procedure Bolhuis, S. van Kan, J.A. Watt, F. PHYSICS Acoustic agitation Development Proton beam writing 10.1016/j.nimb.2009.03.045 Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 12-13 2302-2305 NIMBE 2014-10-16T09:23:53Z 2014-10-16T09:23:53Z 2009-06-15 Article Bolhuis, S., van Kan, J.A., Watt, F. (2009-06-15). Enhancement of proton beam writing in PMMA through optimization of the development procedure. Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms 267 (12-13) : 2302-2305. ScholarBank@NUS Repository. https://doi.org/10.1016/j.nimb.2009.03.045 0168583X http://scholarbank.nus.edu.sg/handle/10635/96475 000267910500073 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Acoustic agitation Development Proton beam writing
spellingShingle	Acoustic agitation Development Proton beam writing Bolhuis, S. van Kan, J.A. Watt, F. Enhancement of proton beam writing in PMMA through optimization of the development procedure
description	10.1016/j.nimb.2009.03.045
author2	PHYSICS
author_facet	PHYSICS Bolhuis, S. van Kan, J.A. Watt, F.
format	Article
author	Bolhuis, S. van Kan, J.A. Watt, F.
author_sort	Bolhuis, S.
title	Enhancement of proton beam writing in PMMA through optimization of the development procedure
title_short	Enhancement of proton beam writing in PMMA through optimization of the development procedure
title_full	Enhancement of proton beam writing in PMMA through optimization of the development procedure
title_fullStr	Enhancement of proton beam writing in PMMA through optimization of the development procedure
title_full_unstemmed	Enhancement of proton beam writing in PMMA through optimization of the development procedure
title_sort	enhancement of proton beam writing in pmma through optimization of the development procedure
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/96475
_version_	1781786472992473088

Enhancement of proton beam writing in PMMA through optimization of the development procedure

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