Enhancement of proton beam writing in PMMA through optimization of the development procedure

Enhancement of proton beam writing in PMMA through optimization of the development procedure

10.1016/j.nimb.2009.03.045

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Bibliographic Details
Main Authors:	Bolhuis, S., van Kan, J.A., Watt, F.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Acoustic agitation Development Proton beam writing
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96475
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

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