Evaluation of the silicon capping technique in SIMS

Evaluation of the silicon capping technique in SIMS

10.1002/sia.1443

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Bibliographic Details
Main Authors: Ng, C.M., Wee, A.T.S., Huan, C.H.A., Ho, C.S., Yakovlev, N., See, A.
Other Authors: PHYSICS
Format: Article
Published: 2014
Subjects:
B
Si
SIMS
Ultrashallow
Online Access:http://scholarbank.nus.edu.sg/handle/10635/96528
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Institution: National University of Singapore
Description
Summary:10.1002/sia.1443

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