Evaluation of the silicon capping technique in SIMS

10.1002/sia.1443

Saved in:

Bibliographic Details
Main Authors:	Ng, C.M., Wee, A.T.S., Huan, C.H.A., Ho, C.S., Yakovlev, N., See, A.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	B Si SIMS Ultrashallow
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/96528
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Be the first to leave a comment!

Similar Items