Evaluation of the silicon capping technique in SIMS
10.1002/sia.1443
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2014
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sg-nus-scholar.10635-965282023-10-27T07:37:47Z Evaluation of the silicon capping technique in SIMS Ng, C.M. Wee, A.T.S. Huan, C.H.A. Ho, C.S. Yakovlev, N. See, A. PHYSICS B Si SIMS Ultrashallow 10.1002/sia.1443 Surface and Interface Analysis 33 9 735-741 SIAND 2014-10-16T09:24:28Z 2014-10-16T09:24:28Z 2002-09 Article Ng, C.M., Wee, A.T.S., Huan, C.H.A., Ho, C.S., Yakovlev, N., See, A. (2002-09). Evaluation of the silicon capping technique in SIMS. Surface and Interface Analysis 33 (9) : 735-741. ScholarBank@NUS Repository. https://doi.org/10.1002/sia.1443 01422421 http://scholarbank.nus.edu.sg/handle/10635/96528 000178413600003 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| topic |
B Si SIMS Ultrashallow |
| spellingShingle |
B Si SIMS Ultrashallow Ng, C.M. Wee, A.T.S. Huan, C.H.A. Ho, C.S. Yakovlev, N. See, A. Evaluation of the silicon capping technique in SIMS |
| description |
10.1002/sia.1443 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Ng, C.M. Wee, A.T.S. Huan, C.H.A. Ho, C.S. Yakovlev, N. See, A. |
| format |
Article |
| author |
Ng, C.M. Wee, A.T.S. Huan, C.H.A. Ho, C.S. Yakovlev, N. See, A. |
| author_sort |
Ng, C.M. |
| title |
Evaluation of the silicon capping technique in SIMS |
| title_short |
Evaluation of the silicon capping technique in SIMS |
| title_full |
Evaluation of the silicon capping technique in SIMS |
| title_fullStr |
Evaluation of the silicon capping technique in SIMS |
| title_full_unstemmed |
Evaluation of the silicon capping technique in SIMS |
| title_sort |
evaluation of the silicon capping technique in sims |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/96528 |
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1781786483534856192 |