Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy
10.1063/1.1592310
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2014
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sg-nus-scholar.10635-980312023-10-26T21:23:48Z Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy Nakajima, K. Joumori, S. Suzuki, M. Kimura, K. Osipowicz, T. Tok, K.L. Zheng, J.Z. See, A. Zhang, B.C. PHYSICS 10.1063/1.1592310 Applied Physics Letters 83 2 296-298 APPLA 2014-10-16T09:42:11Z 2014-10-16T09:42:11Z 2003-07-14 Article Nakajima, K., Joumori, S., Suzuki, M., Kimura, K., Osipowicz, T., Tok, K.L., Zheng, J.Z., See, A., Zhang, B.C. (2003-07-14). Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy. Applied Physics Letters 83 (2) : 296-298. ScholarBank@NUS Repository. https://doi.org/10.1063/1.1592310 00036951 http://scholarbank.nus.edu.sg/handle/10635/98031 000184038900031 Scopus |
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National University of Singapore |
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NUS Library |
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Asia |
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Singapore Singapore |
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NUS Library |
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ScholarBank@NUS |
| description |
10.1063/1.1592310 |
| author2 |
PHYSICS |
| author_facet |
PHYSICS Nakajima, K. Joumori, S. Suzuki, M. Kimura, K. Osipowicz, T. Tok, K.L. Zheng, J.Z. See, A. Zhang, B.C. |
| format |
Article |
| author |
Nakajima, K. Joumori, S. Suzuki, M. Kimura, K. Osipowicz, T. Tok, K.L. Zheng, J.Z. See, A. Zhang, B.C. |
| spellingShingle |
Nakajima, K. Joumori, S. Suzuki, M. Kimura, K. Osipowicz, T. Tok, K.L. Zheng, J.Z. See, A. Zhang, B.C. Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy |
| author_sort |
Nakajima, K. |
| title |
Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy |
| title_short |
Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy |
| title_full |
Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy |
| title_fullStr |
Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy |
| title_full_unstemmed |
Strain profiling of HfO2/Si(001) interface with high-resolution Rutherford backscattering spectroscopy |
| title_sort |
strain profiling of hfo2/si(001) interface with high-resolution rutherford backscattering spectroscopy |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98031 |
| _version_ |
1781786792650866688 |