Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure

10.1023/A:1020096021514

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Bibliographic Details
Main Authors:	Latt, K.M., Park, H.S., Seng, H.L., Osipowicz, T., Lee, Y.K.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98099
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98099
record_format	dspace
spelling	sg-nus-scholar.10635-980992024-11-12T02:04:58Z Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure Latt, K.M. Park, H.S. Seng, H.L. Osipowicz, T. Lee, Y.K. PHYSICS 10.1023/A:1020096021514 Journal of Materials Science 37 19 4181-4188 JMTSA 2014-10-16T09:43:01Z 2014-10-16T09:43:01Z 2002-10-01 Article Latt, K.M., Park, H.S., Seng, H.L., Osipowicz, T., Lee, Y.K. (2002-10-01). Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure. Journal of Materials Science 37 (19) : 4181-4188. ScholarBank@NUS Repository. https://doi.org/10.1023/A:1020096021514 00222461 http://scholarbank.nus.edu.sg/handle/10635/98099 000177822200016 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1023/A:1020096021514
author2	PHYSICS
author_facet	PHYSICS Latt, K.M. Park, H.S. Seng, H.L. Osipowicz, T. Lee, Y.K.
format	Article
author	Latt, K.M. Park, H.S. Seng, H.L. Osipowicz, T. Lee, Y.K.
spellingShingle	Latt, K.M. Park, H.S. Seng, H.L. Osipowicz, T. Lee, Y.K. Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
author_sort	Latt, K.M.
title	Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
title_short	Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
title_full	Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
title_fullStr	Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
title_full_unstemmed	Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure
title_sort	study on sinx passivated cu/ta/sio2/si multilayer structure
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98099
_version_	1821221583074623488

Study on SiNx passivated Cu/Ta/SiO2/Si multilayer structure

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