Thermal stability study of NiSi and NiSi2 thin films

10.1016/j.mee.2003.08.010

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Bibliographic Details
Main Authors:	Zhao, F.F., Zheng, J.Z., Shen, Z.X., Osipowicz, T., Gao, W.Z., Chan, L.H.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Subjects:	Nickel silicides Thermal stability Thin film
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98371
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Institution:	National University of Singapore

id	sg-nus-scholar.10635-98371
record_format	dspace
spelling	sg-nus-scholar.10635-983712024-11-08T21:04:29Z Thermal stability study of NiSi and NiSi2 thin films Zhao, F.F. Zheng, J.Z. Shen, Z.X. Osipowicz, T. Gao, W.Z. Chan, L.H. PHYSICS Nickel silicides Thermal stability Thin film 10.1016/j.mee.2003.08.010 Microelectronic Engineering 71 1 104-111 MIENE 2014-10-16T09:46:17Z 2014-10-16T09:46:17Z 2004-01 Article Zhao, F.F., Zheng, J.Z., Shen, Z.X., Osipowicz, T., Gao, W.Z., Chan, L.H. (2004-01). Thermal stability study of NiSi and NiSi2 thin films. Microelectronic Engineering 71 (1) : 104-111. ScholarBank@NUS Repository. https://doi.org/10.1016/j.mee.2003.08.010 01679317 http://scholarbank.nus.edu.sg/handle/10635/98371 000188002800013 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
topic	Nickel silicides Thermal stability Thin film
spellingShingle	Nickel silicides Thermal stability Thin film Zhao, F.F. Zheng, J.Z. Shen, Z.X. Osipowicz, T. Gao, W.Z. Chan, L.H. Thermal stability study of NiSi and NiSi2 thin films
description	10.1016/j.mee.2003.08.010
author2	PHYSICS
author_facet	PHYSICS Zhao, F.F. Zheng, J.Z. Shen, Z.X. Osipowicz, T. Gao, W.Z. Chan, L.H.
format	Article
author	Zhao, F.F. Zheng, J.Z. Shen, Z.X. Osipowicz, T. Gao, W.Z. Chan, L.H.
author_sort	Zhao, F.F.
title	Thermal stability study of NiSi and NiSi2 thin films
title_short	Thermal stability study of NiSi and NiSi2 thin films
title_full	Thermal stability study of NiSi and NiSi2 thin films
title_fullStr	Thermal stability study of NiSi and NiSi2 thin films
title_full_unstemmed	Thermal stability study of NiSi and NiSi2 thin films
title_sort	thermal stability study of nisi and nisi2 thin films
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98371
_version_	1821206705916084224

Thermal stability study of NiSi and NiSi2 thin films

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