Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate

10.1063/1.2930687

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Bibliographic Details
Main Authors:	Tan, D.X.M., Pey, K.L., Ong, K.K., Colombeau, B., Ng, C.M., Yeong, S.H., Wee, A.T.S., Liu, C.J., Wang, X.C.
Other Authors:	PHYSICS
Format:	Article
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98543
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Institution:	National University of Singapore

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spelling	sg-nus-scholar.10635-985432023-10-30T07:15:49Z Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate Tan, D.X.M. Pey, K.L. Ong, K.K. Colombeau, B. Ng, C.M. Yeong, S.H. Wee, A.T.S. Liu, C.J. Wang, X.C. PHYSICS 10.1063/1.2930687 Applied Physics Letters 92 20 - APPLA 2014-10-16T09:48:20Z 2014-10-16T09:48:20Z 2008 Article Tan, D.X.M., Pey, K.L., Ong, K.K., Colombeau, B., Ng, C.M., Yeong, S.H., Wee, A.T.S., Liu, C.J., Wang, X.C. (2008). Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate. Applied Physics Letters 92 (20) : -. ScholarBank@NUS Repository. https://doi.org/10.1063/1.2930687 00036951 http://scholarbank.nus.edu.sg/handle/10635/98543 000256196600075 Scopus
institution	National University of Singapore
building	NUS Library
continent	Asia
country	Singapore Singapore
content_provider	NUS Library
collection	ScholarBank@NUS
description	10.1063/1.2930687
author2	PHYSICS
author_facet	PHYSICS Tan, D.X.M. Pey, K.L. Ong, K.K. Colombeau, B. Ng, C.M. Yeong, S.H. Wee, A.T.S. Liu, C.J. Wang, X.C.
format	Article
author	Tan, D.X.M. Pey, K.L. Ong, K.K. Colombeau, B. Ng, C.M. Yeong, S.H. Wee, A.T.S. Liu, C.J. Wang, X.C.
spellingShingle	Tan, D.X.M. Pey, K.L. Ong, K.K. Colombeau, B. Ng, C.M. Yeong, S.H. Wee, A.T.S. Liu, C.J. Wang, X.C. Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
author_sort	Tan, D.X.M.
title	Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
title_short	Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
title_full	Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
title_fullStr	Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
title_full_unstemmed	Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
title_sort	vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate
publishDate	2014
url	http://scholarbank.nus.edu.sg/handle/10635/98543
_version_	1781786901485715456

Vacancy engineering by optimized laser irradiation in boron-implanted, preamorphized silicon substrate

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