Deep ion beam lithography for micromachining applications

Deep ion beam lithography for micromachining applications

10.1117/12.280533

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Bibliographic Details
Main Authors: Springham, S.V., Osipowicz, T., Sanchez, J.L., Lee, S., Watt, F.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Subjects:
DIBL
High aspect-ratio
LIGA
Mask fabrication
MEMS
Micromachining
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98663
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Institution: National University of Singapore
id sg-nus-scholar.10635-98663
record_format dspace
spelling sg-nus-scholar.10635-986632023-10-26T20:18:11Z Deep ion beam lithography for micromachining applications Springham, S.V. Osipowicz, T. Sanchez, J.L. Lee, S. Watt, F. PHYSICS DIBL High aspect-ratio LIGA Mask fabrication MEMS Micromachining 10.1117/12.280533 Proceedings of SPIE - The International Society for Optical Engineering 3183 128-137 PSISD 2014-10-16T09:49:56Z 2014-10-16T09:49:56Z 1997 Conference Paper Springham, S.V., Osipowicz, T., Sanchez, J.L., Lee, S., Watt, F. (1997). Deep ion beam lithography for micromachining applications. Proceedings of SPIE - The International Society for Optical Engineering 3183 : 128-137. ScholarBank@NUS Repository. https://doi.org/10.1117/12.280533 0277786X http://scholarbank.nus.edu.sg/handle/10635/98663 A1997BJ57L00013 Scopus
institution National University of Singapore
building NUS Library
continent Asia
country Singapore
Singapore
content_provider NUS Library
collection ScholarBank@NUS
topic DIBL
High aspect-ratio
LIGA
Mask fabrication
MEMS
Micromachining
spellingShingle DIBL
High aspect-ratio
LIGA
Mask fabrication
MEMS
Micromachining
Springham, S.V.
Osipowicz, T.
Sanchez, J.L.
Lee, S.
Watt, F.
Deep ion beam lithography for micromachining applications
description 10.1117/12.280533
author2 PHYSICS
author_facet PHYSICS
Springham, S.V.
Osipowicz, T.
Sanchez, J.L.
Lee, S.
Watt, F.
format Conference or Workshop Item
author Springham, S.V.
Osipowicz, T.
Sanchez, J.L.
Lee, S.
Watt, F.
author_sort Springham, S.V.
title Deep ion beam lithography for micromachining applications
title_short Deep ion beam lithography for micromachining applications
title_full Deep ion beam lithography for micromachining applications
title_fullStr Deep ion beam lithography for micromachining applications
title_full_unstemmed Deep ion beam lithography for micromachining applications
title_sort deep ion beam lithography for micromachining applications
publishDate 2014
url http://scholarbank.nus.edu.sg/handle/10635/98663
_version_ 1781786925960527872

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