Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing
10.1149/1.2778395
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2014
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sg-nus-scholar.10635-987232015-01-17T03:18:07Z Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing Pey, K.L. Ong, K.K. Lee, P.S. Setiawan, Y. Wang, X.C. Wee, A.T.S. Lim, G.C. PHYSICS 10.1149/1.2778395 ECS Transactions 11 6 379-394 2014-10-16T09:50:40Z 2014-10-16T09:50:40Z 2007 Conference Paper Pey, K.L.,Ong, K.K.,Lee, P.S.,Setiawan, Y.,Wang, X.C.,Wee, A.T.S.,Lim, G.C. (2007). Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing. ECS Transactions 11 (6) : 379-394. ScholarBank@NUS Repository. <a href="https://doi.org/10.1149/1.2778395" target="_blank">https://doi.org/10.1149/1.2778395</a> 9781566775724 19385862 http://scholarbank.nus.edu.sg/handle/10635/98723 NOT_IN_WOS Scopus |
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National University of Singapore |
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NUS Library |
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Singapore |
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ScholarBank@NUS |
| description |
10.1149/1.2778395 |
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PHYSICS |
| author_facet |
PHYSICS Pey, K.L. Ong, K.K. Lee, P.S. Setiawan, Y. Wang, X.C. Wee, A.T.S. Lim, G.C. |
| format |
Conference or Workshop Item |
| author |
Pey, K.L. Ong, K.K. Lee, P.S. Setiawan, Y. Wang, X.C. Wee, A.T.S. Lim, G.C. |
| spellingShingle |
Pey, K.L. Ong, K.K. Lee, P.S. Setiawan, Y. Wang, X.C. Wee, A.T.S. Lim, G.C. Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| author_sort |
Pey, K.L. |
| title |
Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| title_short |
Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| title_full |
Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| title_fullStr |
Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| title_full_unstemmed |
Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| title_sort |
formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing |
| publishDate |
2014 |
| url |
http://scholarbank.nus.edu.sg/handle/10635/98723 |
| _version_ |
1681092075945197568 |