Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing

Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing

10.1149/1.2778395

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Bibliographic Details
Main Authors: Pey, K.L., Ong, K.K., Lee, P.S., Setiawan, Y., Wang, X.C., Wee, A.T.S., Lim, G.C.
Other Authors: PHYSICS
Format: Conference or Workshop Item
Published: 2014
Online Access:http://scholarbank.nus.edu.sg/handle/10635/98723
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Institution: National University of Singapore

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http://scholarbank.nus.edu.sg/handle/10635/98723

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