Formation of silicided hyper-shallow p+/n- junctions by pulsed laser annealing

10.1149/1.2778395

Saved in:

Bibliographic Details
Main Authors:	Pey, K.L., Ong, K.K., Lee, P.S., Setiawan, Y., Wang, X.C., Wee, A.T.S., Lim, G.C.
Other Authors:	PHYSICS
Format:	Conference or Workshop Item
Published:	2014
Online Access:	http://scholarbank.nus.edu.sg/handle/10635/98723
Tags:	Add Tag No Tags, Be the first to tag this record!
Institution:	National University of Singapore

Be the first to leave a comment!

Similar Items