Simultaneous enhancement of carrier mobility and concentration via tailoring of Al-chemical states in Al-ZnO thin films
© 2015 AIP Publishing LLC. Simultaneously achieving higher carriers concentration and mobility is a technical challenge against up-scaling the transparent-conductive performances of transparent-conductive oxides. Utilizing one order higher dense (∼1 × 1011cm-3) plasmas (in comparison to the conventi...
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| Main Authors: | , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=84934983761&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/54862 |
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| Institution: | Chiang Mai University |