Plasma biasing to control the growth conditions of diamond-like carbon
It is well known that the structure and properties of diamond-like carbon, and in particular the sp3/sp2ratio, can be controlled by the energy of the condensing carbon ions or atoms. In many practical cases, the energy of ions arriving at the surface of the growing film is determined by the bias app...
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| Main Authors: | , , , , |
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| Format: | Journal |
| Published: |
2018
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| Subjects: | |
| Online Access: | https://www.scopus.com/inward/record.uri?partnerID=HzOxMe3b&scp=33845308546&origin=inward http://cmuir.cmu.ac.th/jspui/handle/6653943832/60970 |
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| Institution: | Chiang Mai University |