Direct laser patterning of a 2D WSe2 logic circuit

• Main Authors: Zhu, Chao, Zhao, Xiaoxu, Wang, Xiaowei, Chen, Jieqiong, Yu, Peng, Liu, Song, Zhou, Jiadong, Fu, Qundong, Zeng, Qingsheng, He, Yongmin, Edgar, James H., Pennycook, Stephen J., Liu, Fucai, Liu, Zheng
• Other Authors: School of Materials Science and Engineering
• Format: Article
• Language: English
• Published: 2021
• Subjects: Engineering::Materials::Microelectronics and semiconductor materials; Controllable Doping; Direct Laser Patterning
• Online Access: https://hdl.handle.net/10356/148303
• Institution: Nanyang Technological University

Carrier doping is the basis of the modern semiconductor industry. Great efforts are put into the control of carrier doping for 2D semiconductors, especially the layered transition metal dichalcogenides. Here, the direct laser patterning of WSe2 devices via light‐induced hole doping is systematically...